A CNN-powered AI-driven approach to semiconductor defect classification

Published in AIx Conference, 2022

Recommended citation: S. Kallakuri, Z. Zhang, R. Patil, L. Sun, M. Copic. 2022. "A CNN-powered AI-driven approach to semiconductor defect classification." AIx Conference. Applied Materials /files/pdf/research/2022 - Multiscale hierarchical structures from a nanocluster mesophase.pdf